Quantum X Plus High Current Implanter
AMAT
產品描述
-Manufacturer : AMAT
-Type : Sputtering System
-Model : Quantum X Plus
技術支持
EQUIPMENT DETAILS:
Currently configured for 300mm wafer sizes Inspect to confirm configuration and condition. Process: Low Energy/High Current
Software version: 2.07
System Power Rating: 208 AC 3-Phase for System 4 Load Ports
Mainframe Chamber: N2/Ar/AsH3/BF3/PH3/CDA
