-Manufacturer : Ultratech
-Type : Wafer Stepper
-Model : Saturn Spectrum 3e
- ghi-line Broadband Lens
- Universal Wafer Size Change Kit: 4", 5" ,6" &8"
- Auto Wafer Thickness Compensator (0.4 to 4.0mm)
- Robotic Wafer Handler
- PATMAX MVS Alignment System
- Lens Distortion Reference-No lens matching
- 6x6 inch Reticle Type
- Dual Flip Aperture, 2,3 and 4 field
- Dynamic Focus w/extended range+200um
- Stepper Power Source: 208 three phase
- Environmental Chamber
- Chamber Power Source: 208 three phase
- SECSII Compatible
- ghi-line Automatic Filter Changer
- 1200 W Illuminator
Options to include:
- Bottom Pellicle Protection
- 44mm x 26.7mm Field Size
- ??SEMI standard. JEIDA standard is optional.
NOTE: with SMIF, only 150mm and 200mm are valid options for wafer size.