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    Ultratech Saturn Spectrum 3e
    產品描述

    -Manufacturer : Ultratech

    -Type : Wafer Stepper

    -Model : Saturn Spectrum 3e


    技術支持

    Major Specifications:
    ghi-line Broadband Lens
    - Universal Wafer Size Change Kit: 4", 5" ,6" &8"
    - Auto Wafer Thickness Compensator (0.4 to 4.0mm)
    - Robotic Wafer Handler
    - PATMAX MVS Alignment System
    - Lens Distortion Reference-No lens matching
    - 6x6 inch Reticle Type
    - Dual Flip Aperture, 2,3 and 4 field
    - Dynamic Focus w/extended range+200um
    - Stepper Power Source: 208 three phase
    - Environmental Chamber
    - Chamber Power Source: 208 three phase
    - SECSII Compatible
    - ghi-line Automatic Filter Changer
    - 1200 W Illuminator
    Options to include:
    - Bottom Pellicle Protection
    - 44mm x 26.7mm Field Size
    - SEMI standard. JEIDA standard is optional.

    NOTE: with SMIF, only 150mm and 200mm are valid options for wafer size.

    返回列表
    聯系
    Contact
    上海友相電子科技有限公司

    地址:上海嘉定區曹安公路5588號814

    電話:+86 21 58886448      +86 13182712576(周先生)

    傳真:+86 21 58886440      Email: yi_zhou@chinauvision.com


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