Magnum SST
Semitool
產品描述
-Manufacturer : Semitool
-Type : Scrubber
-Model: Magnum SST
技術支持
-The system is a solvent strip tool.
-It consists of a cassette loading area (where up to 2 cassettes may be placed).
-The WIP contains a series of robotic arms and a lift mechanism which transfers the wafers to a shelf.
- A robot moves along the entire length of the machine and is used to transfer wafers from the shelf in the WIP area to either the CPC strip chamber or the SRD drying chamber
