- Manufacturer : M TEK
- Type : SRD Wafer Cleaning
- Model: SRD 880S
Semitool 880S “Dual Stack” SRD consisting of:
- Dual PSC-101 Controllers
- Anti-Static with N2 Purge
- Emergency Power Off (EPO)
- Resistivity Monitor and Water Circulation
- Quick Disconnect Rotor
- N2 Rear Seal
- Capable of processing up to 8"/200mm wafers.
- rotors included 2xsemitool rotor A192-81M 150MM.