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          Ultratech Saturn Spectrum 3e
          Product Description

          -Manufacturer : Ultratech

          -Type : Wafer Stepper

          -Model : Saturn Spectrum 3e


          Technical Support

          Major Specifications:
          ghi-line Broadband Lens
          - Universal Wafer Size Change Kit: 4", 5" ,6" &8"
          - Auto Wafer Thickness Compensator (0.4 to 4.0mm)
          - Robotic Wafer Handler
          - PATMAX MVS Alignment System
          - Lens Distortion Reference-No lens matching
          - 6x6 inch Reticle Type
          - Dual Flip Aperture, 2,3 and 4 field
          - Dynamic Focus w/extended range+200um
          - Stepper Power Source: 208 three phase
          - Environmental Chamber
          - Chamber Power Source: 208 three phase
          - SECSII Compatible
          - ghi-line Automatic Filter Changer
          - 1200 W Illuminator
          Options to include:
          - Bottom Pellicle Protection
          - 44mm x 26.7mm Field Size
          - SEMI standard. JEIDA standard is optional.

          NOTE: with SMIF, only 150mm and 200mm are valid options for wafer size.

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          Contact Us
          Uvision Technology Ltd

          Add: Rm 814, NO.5588 ,Cao 'an Road, Jiading District, Shanghai, China

          Tel:+86 21 58886448      +86 13182712576(Mr.Zhou)

          Fax:+86 21 58886440      Email: yi_zhou@chinauvision.com

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