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          AP300
          Product Description

          -Manufacturer : Ultratech

          -Type : Wafer Stepper

          -Model : AP300


          Technical Support

          Ultratech Stepper AP300 (i-Line Stepper) 

          Configuration:

          1、 Standard Features Target: 

          -2.0 um, Extended Field, ghi-lineBroadband Lens ?  Dual 1200 W LampIlluminator

          -Universal Size/Warped Wafer Kit: 200,and 300mm.

          -FOSB Cassette to Cassette WaferHandling

          -Wafer Thickness Handling from 0.4 mmto 2.0 mm 

          -PATMAX MVS Alignment System

          -MVS Alignment Spectrum of 530 - 570 nm 

          -Lens Distortion Reference - No lensmatching 

          -6 Slot Reticle Stack, Manual FrontLoading   GEM HSMS Communications 

          -Power Source: 208 V three phase, 5wire, 150 amp 

          -Environmental Chamber

          2、 AP300 Test Reticle 6x6

          3、 FOUP Wafer Handler

          4、 Enhanced Bottom Pellicle Protection

          5、 ghi-line AutoFilter Changer 

          6、 Edge Exclusion System with one Exclusion Ring Specify ring size (15mm) 

          7、 Closed Loop Cooling 

          8、 Prism Purge Kit (requires CLC) 


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          Contact Us
          Uvision Technology Ltd

          Add: Rm 814, NO.5588 ,Cao 'an Road, Jiading District, Shanghai, China

          Tel:+86 21 58886448      +86 13182712576(Mr.Zhou)

          Fax:+86 21 58886440      Email: yi_zhou@chinauvision.com

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